ME509 - Piezoresistive Flush Membrane

Metallux ME509 pressure sensors are made with a ceramic base plate and a flush diaphragm, based on the piezoresistive principle. Metallux ME509 pressure sensors are specifically designed to measure very low pressure. The Wheatstone bridge is screen printed on one side of the flush ceramic diaphragm which is, in turn, glued to the sensor’s body. The bridge faces the inside where a cavity is made and the diaphragm’s opposite side can therefore be exposed directly to the medium to be measured. Higher sensitivity is reached thanks to a larger diameter (32.4 mm), thus allowing the measure of pressure values as low as 200 mbar. Because of the Al2O3 ceramic excellent chemical resistance (aggressive gases, most of solvents and acids, etc.), no additional protection is normally required. Metallux ME509 sensors are thermally compensated by laser-adjustable PTC resistors and the use of ceramic ensures a high linearity across the entire range of measurement, reducing effects of hysteresis to a minimum.

FEATURES
High sensitivity, low nominal pressure values
Excellent resistance to corrosion and abrasion
Thermally compensated
Extended customization

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